自然科學
大學
求救啊QQ
一一~ /
三、MWOS7E了了
工efs wo表 ouf Moore:s Jaw, which states the 人
7PD-fype Subsfrafe
(58ody)Cpanmnel
吧 和 Tegion
, Drain reglon f
“Fi9. 3-1 (LeftA planar MOSFET; (Right) a FinFET
Metal (gate) 0
| Oxide
nmrsource 1 nm p-Si nm+ drain
SiO.
2
Si substrate
Fig. 3-2 An SOI Si MOSFET
(人) Bora egular MOSFET, to increase the transistor countina wafer without affecting
了e device performance (i.e. current level), we prefer to reduce the gate length. If the
gate length is reduced by a factor of V2 “with the same current level, how_many
兩ore transistors wil] you get on a wafer? This gives you why the next generation ofx
2
一nm一10nm 一 7mm 人當5nm 一 3nm). Assume the wafe size is much larger
也an 也e fransistor dimension. (2%)
了he channel regions for FinFET structures in a cross sectional view ofthe
他 EE by using Ka FinFET to replace a planar
Re womt be any inversion carriers at
對(9
時 souree and dminregioms are right next to the gated
ln 品汪 in the surface
j] HIHWe useaFinFET
We can keep the gat
Wave a gate length 0
吧gate length is 20 mm
We Tatio of transist0! 上
assumption ai (一
說
廳 We _ want to have the same Current for each _transistor。by Teducing te
dimension of channelto 5 nm Width, but keeping the same gate length, What is the
Iatio of transistor count if we increase the Fin height to 80 nm? (4%)
(四) 了plain why you need a p-type substrate_ for a a-MOSFET. Note you have to ansWer
Why zz Junctions_ between Source/substrate and drain/substrate are required. Further,
Wwhy_ cant we make a planar #-MOSFET on an type substrate_With 人source_ and
九drain? (6%)
(五)For now, we have a new structure_ called “ultrathin-body silicon-on-insulator
(UTBSOD”MOSFET (Fig. 3-2). The channel doping is p-type and 10 cm .Please
draw its depletion region and the channel region When the device is turned on. (4o)
(六)Fwe change the channel doping to ntype, unlike (四), its Still a ttansistor, EXplain
Why. We usually call it a junetionless transistor. IS it n-MOSFET qr D-MOSFET?
el region when the devices is ON. When the device is ON, is there
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